The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Dec. 11, 2020
Applicant:
Asml Netherlands B.v., Valkenswaard, NL;
Inventors:
Johannes Catharinus Hubertus Mulkens, Valkenswaard, NL;
Nicolaas Ten Kate, Almkerk, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70908 (2013.01); G03F 7/708 (2013.01); G03F 7/7085 (2013.01); G03F 7/70341 (2013.01); G03F 7/70716 (2013.01); G03F 7/70725 (2013.01); G03F 7/70775 (2013.01); G03F 7/70808 (2013.01); G03F 7/70825 (2013.01); G03F 7/70866 (2013.01); G03F 7/70916 (2013.01); G03B 27/32 (2013.01);
Abstract
A difficulty of contamination interfering with a grid plate positional measurement system is addressed. In one embodiment contamination is prevented from coming into contact with the grating or the sensor. In an embodiment, surface acoustic waves are used to detach contamination from a surface of the grating or sensor.