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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11609495 B1

PDFFull Text
Date of Patent:
Mar. 21, 2023

Filed:

Oct. 27, 2020

Radiation-sensitive resin composition and resist pattern-forming method

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Katsuaki Nishikori, Tokyo, JP;

Kazuya Kiriyama, Tokyo, JP;

Takuhiro Taniguchi, Tokyo, JP;

Ken Maruyama, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Element IP, PLC

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C08F 220/18 (2006.01); C07D 317/70 (2006.01); C07C 381/12 (2006.01); C07C 309/17 (2006.01); C07D 327/04 (2006.01); C07C 309/12 (2006.01); C07C 65/10 (2006.01); C07C 59/115 (2006.01); C07C 69/63 (2006.01); C07C 65/05 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 59/115 (2013.01); C07C 65/05 (2013.01); C07C 65/10 (2013.01); C07C 69/63 (2013.01); C07C 309/12 (2013.01); C07C 309/17 (2013.01); C07C 381/12 (2013.01); C07D 317/70 (2013.01); C07D 327/04 (2013.01); C08F 220/1805 (2020.02); C08F 220/1806 (2020.02); C08F 220/1807 (2020.02); C08F 220/1808 (2020.02); C08F 220/1809 (2020.02); C08F 220/1812 (2020.02); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); C07C 2601/08 (2017.05); C07C 2603/74 (2017.05);
Abstract

A radiation-sensitive resin composition includes a polymer including a phenolic hydroxyl group, a compound represented by formula (1-1) or formula (1-2), and a compound represented by formula (2). In the formula (1-1), a sum of a, b, and c is no less than 1; at least one of R, R, and Rrepresents a fluorine atom or the like; and Rand Reach independently represent a hydrogen atom, a fluorine atom, or the like. In the formula (1-2), in a case in which d is 1, Rrepresents a fluorine atom or the like, and in a case in which d is no less than 2, at least one of the plurality of Rs represents a fluorine atom or the like; and Rrepresents a single bond or a divalent organic group having 1 to 20 carbon atoms.

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