The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2023
Filed:
Jul. 31, 2020
Boron-containing compounds, compositions, and methods for the deposition of a boron containing films
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Xinjian Lei, Vista, CA (US);
Moo-Sung Kim, Ansan-Si, KR;
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C07F 5/02 (2006.01); C23C 16/455 (2006.01); C07F 5/05 (2006.01); C23C 16/34 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02205 (2013.01); C07F 5/022 (2013.01); C07F 5/027 (2013.01); C07F 5/05 (2013.01); C23C 16/34 (2013.01); C23C 16/342 (2013.01); C23C 16/345 (2013.01); C23C 16/45536 (2013.01); H01L 21/0217 (2013.01); H01L 21/02175 (2013.01); H01L 21/02274 (2013.01); H01L 29/16 (2013.01);
Abstract
Described herein are boron-containing precursor compounds, and compositions and methods comprising same, for forming boron-containing films. In one aspect, the film is deposited from at least one precursor having the following Formula I or II described herein.
Quick Actions:
Lei, Xinjian. (2023). Boron-containing compounds, compositions, and methods for the deposition of a boron containing films (U.S. Patent No. 11605535). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11605535
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