The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Feb. 17, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Zihao Yang, Santa Clara, CA (US);
Mingwei Zhu, San Jose, CA (US);
Shriram Mangipudi, Santa Clara, CA (US);
Mohammad Kamruzzaman Chowdhury, Phoenix, AZ (US);
Shane Lavan, Palo Alto, CA (US);
Zhebo Chen, San Jose, CA (US);
Yong Cao, San Jose, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 39/12 (2006.01); H01L 39/22 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
H01L 39/12 (2013.01); H01L 39/223 (2013.01); G02B 6/12 (2013.01);
Abstract
A superconducting device includes a substrate, a metal oxide or metal oxynitride seed layer on the substrate, and a metal nitride superconductive layer disposed directly on the seed layer. The seed layer is an oxide or oxynitride of a first metal, and the superconductive layer is a nitride of a different second metal.