The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Jun. 25, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Masaki Tomita, Tokyo, JP;
Junitsu Yamakawa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B25J 15/06 (2006.01); B65G 49/06 (2006.01); C25D 17/06 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B25J 15/06 (2013.01); B65G 49/06 (2013.01); C25D 17/06 (2013.01); H01L 21/67259 (2013.01);
Abstract
Provided is a substrate holding device that inhibits drop in holding accuracy of a substrate. A Bernoulli chucking pad suctions and holds a front surface or a back surface of a substrate S. A position determineris capable of pushing the substrate S in contact with a side surfaceof the substrate S, and positioning the suctioned substrate S. A pinenables the position determinerto come in contact with the side surfaceof the substrate S. The pinbrings the position determinerinto contact with the side surfaceof the substrate S, and the position determinerthereby positions the substrate S.