The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Sep. 12, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Faruk Gungor, San Jose, CA (US);
Dien-Yeh Wu, San Jose, CA (US);
Joel M. Huston, San Jose, CA (US);
Mei Chang, Saratoga, CA (US);
Xiaoxiong Yuan, San Jose, CA (US);
Kazuya Daito, Milipitas, CA (US);
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Takashi Kuratomi, San Jose, CA (US);
Yu Chang, San Jose, CA (US);
Bin Cao, Fremont, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Apparatus for processing a substrate are provided herein. In some embodiments a showerhead assembly includes a gas distribution plate having a plurality of apertures; a holder having a wall, an radially inwardly extending flange extending from a lower portion of the wall and coupled to the gas distribution plate, and a radially outwardly extending flange extending from an upper portion of the wall, wherein the wall has a thickness between about 0.015 inches and about 0.2 inches; and a heating apparatus disposed above and spaced apart from the gas distribution plate, wherein the heating apparatus includes a heater configured to heat the gas distribution plate.