The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Jan. 30, 2018
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Xinjian Lei, Vista, CA (US);
Manchao Xiao, San Diego, CA (US);
Matthew R. MacDonald, Laguna Niguel, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Meiliang Wang, San Marcos, CA (US);
Suresh Kalpatu Rajaraman, San Marcos, CA (US);
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C08K 5/5415 (2006.01); C08L 83/08 (2006.01); C08G 77/54 (2006.01); C07F 7/10 (2006.01); C09D 183/08 (2006.01); C08G 77/26 (2006.01); C08G 77/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); C07F 7/10 (2013.01); C08G 77/54 (2013.01); C08K 5/5415 (2013.01); C08L 83/08 (2013.01); C09D 183/08 (2013.01); C23C 16/45553 (2013.01); C08G 77/045 (2013.01); C08G 77/26 (2013.01);
Abstract
Organoamino-polysiloxanes, which have at least three silicon atoms, oxygen atoms, as well as an organoamino group, and methods for making the organoamino-polysiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-polysiloxanes are also disclosed.