The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2023

Filed:

Feb. 05, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Maarten Kuijper, Eindhoven, NL;

Matthijn Robert-Jan Vos, Eindhoven, NL;

Ondrej Ludmil Shànël, Brno, CZ;

Peet Goedendorp, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G01N 21/55 (2014.01); G01N 21/59 (2006.01); H01J 37/21 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/228 (2013.01); G01N 21/55 (2013.01); G01N 21/59 (2013.01); H01J 37/21 (2013.01); H01J 37/26 (2013.01);
Abstract

The invention relates to a device and method for determining a property of a sample that is to be used in a charged particle microscope. The sample comprises a specimen embedded within a matrix layer. The device comprises a light source arranged for directing a beam of light towards said sample, and a detector arranged for detecting light emitted from said sample in response to said beam of light being incident on said sample. Finally, the device comprises a controller that is connected to said detector and arranged for determining a property of said matrix layer based on signals received by said detector.


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