The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Dec. 02, 2019
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Yasuhiro Yoshii, Kawasaki, JP;
Masahito Yahagi, Kawasaki, JP;
Yoichi Hori, Kawasaki, JP;
Takahiro Kojima, Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki, JP;
Abstract
A resist composition including a compound (D0) represented by general formula (d0) and a resin component (A1) has a structural unit (a0) in which a compound represented by general formula (a0-1) has a polymerizable group within the Wportion converted into a main chain (in formula (d0), Rdrepresents a fluorine atom or a fluorinated alkyl group; In formula (a0-1), Wrepresents a polymerizable group-containing group; Crepresents a tertiary carbon atom, and the α-position of Cis a carbon atom which constitutes a carbon-carbon unsaturated bond; Rrepresents an aromatic hydrocarbon group; or a chain hydrocarbon group; Rand Reach independently represents a chain hydrocarbon group, or Rand Rare mutually bonded to form a cyclic group).