The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2023

Filed:

Apr. 13, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Daniel Billingsley, Meridian, ID (US);

Jordan D. Greenlee, Boise, ID (US);

Yongjun Jeff Hu, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 27/11519 (2017.01); H01L 27/11524 (2017.01); H01L 27/11565 (2017.01); H01L 27/1157 (2017.01); H01L 21/311 (2006.01); H01L 27/11556 (2017.01); H01L 27/11582 (2017.01); H01L 21/3115 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 27/1157 (2013.01); H01L 27/11519 (2013.01); H01L 27/11524 (2013.01); H01L 27/11565 (2013.01); H01L 21/31111 (2013.01); H01L 21/31155 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01);
Abstract

A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Bridge material is formed across the trenches laterally-between and longitudinally-along immediately-laterally-adjacent of the memory-block regions. The bridge material comprises longitudinally-alternating first and second regions. The first regions of the bridge material are ion implanted differently than the second regions of the bridge material to change relative etch rate of one of the first or second regions relative to the other in an etching process. The first and second regions are subjected to the etching process to selectively etch away one of the first and second regions relative to the other to form bridges that extend across the trenches laterally-between and longitudinally-spaced-along the immediately-laterally-adjacent memory-block regions. Other embodiments and structure independent of method are disclosed.


Find Patent Forward Citations

Loading…