The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Mar. 10, 2020
Asml Netherlands B.v., Veldhoven, NL;
Sander Catharina Reinier Derks, Budel, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Maurice Wilhelmus Leonardus Hendricus Feijts, Beek, NL;
Pieter Gerardus Mathijs Hoeijmakers, Veldhoven, NL;
Katja Cornelia Joanna Clasina Moors, Eindhoven, NL;
Violeta Navarro Paredes, Eindhoven, NL;
William Peter Van Drent, Best, NL;
Jan Steven Christiaan Westerlaken, Heesch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W mK.