The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Sep. 13, 2021
Applicant:
Bruker Nano, Inc., Santa Barbara, CA (US);
Inventors:
Shuiqing Hu, Santa Barbara, CA (US);
Martin Wagner, Goleta, CA (US);
Weijie Wang, Thousand Oaks, CA (US);
Chanmin Su, Ventura, CA (US);
Assignee:
Bruker Nano, Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01Q 60/38 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01); G01Q 60/38 (2013.01);
Abstract
A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.