The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Jan. 20, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Akihiro Kubo, Koshi, JP;
Yasushi Takiguchi, Koshi, JP;
Teruhiko Kodama, Koshi, JP;
Yoshiki Okamoto, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/04 (2006.01); B08B 11/02 (2006.01); B08B 3/04 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); B08B 1/00 (2006.01);
U.S. Cl.
CPC ...
B08B 1/04 (2013.01); B08B 1/00 (2013.01); B08B 3/04 (2013.01); B08B 11/02 (2013.01); H01L 21/02052 (2013.01); H01L 21/67046 (2013.01); H01L 21/68764 (2013.01);
Abstract
A substrate cleaning apparatus configured to clean a surface of a substrate having a circular shape by bringing a cleaning member into contact with the surface of the substrate and rotating the substrate and the cleaning member relatively is provided. A contact region of the cleaning member which comes into contact with the surface of the substrate is widened in a radial shape from a center side of the substrate toward a peripheral side thereof.