The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Apr. 24, 2020
Applicant:
Beneq Oy, Espoo, FI;
Inventors:
Assignee:
BENEQ OY, Espoo, FI;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F24F 7/007 (2006.01); F24F 7/00 (2021.01); F24F 7/08 (2006.01); F17C 13/08 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
F24F 7/007 (2013.01); F24F 7/00 (2013.01); F24F 7/08 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); F17C 13/08 (2013.01); F17C 2205/0111 (2013.01); F17C 2270/0518 (2013.01); F24F 2007/001 (2013.01); F24F 2007/0025 (2021.01);
Abstract
A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.