The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
May. 05, 2021
Applicant:
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Inventors:
Assignee:
ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH, Heimstetten, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/10 (2006.01); H01J 37/26 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/10 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 2237/049 (2013.01); H01J 2237/2817 (2013.01); H01J 2237/2826 (2013.01);
Abstract
A charged particle beam apparatus with a charged particle source to generate a primary charged particle beam, a sample holder to hold a sample for impingement of the primary charged particle beam on the sample, a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample, and an electrode to collect electrons emitted from the sample in a non-linear photoemission.