Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation

Abstract

An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. At least one misalignment compensation element is configured to reduce a signal offset that results from a misalignment of at least one coil of the coil board configuration (e.g., the coil board configuration may comprise a printed circuit board with a plurality of layers in which the coils are located and the misalignment of the at least one coil may result from a registration error, such as within manufacturing tolerances, in a layer to layer registration as part of a fabrication process).