The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Sep. 14, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Adrien Lavoie, Newberg, OR (US);
Pulkit Agarwal, Beaverton, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/02 (2006.01); C23C 16/40 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/402 (2013.01); H01L 21/0228 (2013.01); H01L 21/02164 (2013.01); H01L 22/12 (2013.01);
Abstract
An apparatus for processing stacks is provided. A first gas source is provided. A first gas manifold is connected to the first gas source. A first processing station has a first gas outlet, wherein the first gas outlet is connected to the first gas manifold. A first variable conductance valve is between the first gas source and the first gas outlet along the first gas manifold.