The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
May. 29, 2020
Mks Instruments, Inc., Andover, MA (US);
Larry J. Fisk, II, Fairport, NY (US);
Benjamin J. Gitlin, Rochester, NY (US);
Mariusz Oldziej, Avon, NY (US);
Aaron M. Burry, Ontario, NY (US);
Matthew G. Harrington, Campbell, CA (US);
Aaron T. Radomski, Conesus, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.