The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Nov. 24, 2020
Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbances
Mks Instruments, Inc., Andover, MA (US);
Aaron M. Burry, Ontario, NY (US);
Aaron T. Radomski, Conesus, NY (US);
Mariusz Oldziej, Avon, NY (US);
Peter Paul, Penfield, NY (US);
Ross Reinhardt, Rochester, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.