The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jan. 31, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Gang Grant Peng, Fremont, CA (US);
David W. Groechel, Los Altos Hills, CA (US);
Han Wang, Palo Alto, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/56 (2006.01); H01J 37/34 (2006.01); C23C 16/40 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/56 (2013.01); C23C 16/405 (2013.01); H01J 37/32495 (2013.01); H01J 37/3426 (2013.01);
Abstract
One example of the disclosure provides a method of fabricating a chamber component with a coating comprising a yttrium containing material with desired film properties. In one example, the method of fabricating a coating material includes providing a base structure comprising an aluminum containing material. The method further includes forming a coating layer that includes a yttrium containing material on the base structure. The method also includes thermal treating the coating layer to form a treated coating layer.