The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Apr. 13, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Shuji Akiyama, Yamanashi, JP;
Hiroki Hosaka, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F24F 11/00 (2018.01); G01R 31/26 (2020.01); G01R 1/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); F24F 11/0001 (2013.01); G01R 31/2601 (2013.01); H01L 21/67288 (2013.01); G01R 1/04 (2013.01);
Abstract
A wafer inspection apparatus according to one embodiment is a wafer inspection apparatus including a plurality of inspection parts arranged in a height direction and a lateral direction, and includes a pair of air circulating means disposed at both ends in a longitudinal direction of an air circulating region including the plurality of inspection parts arranged in the lateral direction and configured to circulate air in the circulating region.