The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Dec. 23, 2020
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Ruilong Xie, Niskayuna, NY (US);

Ekmini Anuja De Silva, Slingerlands, NY (US);

Jing Guo, Niskayuna, NY (US);

Hao Tang, Slingerlands, NY (US);

Cheng Chi, Jersey City, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 29/45 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H01L 29/08 (2006.01); H01L 21/265 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41733 (2013.01); H01L 29/0847 (2013.01); H01L 29/401 (2013.01); H01L 29/456 (2013.01); H01L 29/66742 (2013.01); H01L 29/78696 (2013.01); H01L 21/26506 (2013.01); H01L 29/0665 (2013.01); H01L 29/42392 (2013.01); H01L 29/4908 (2013.01); H01L 29/517 (2013.01);
Abstract

A field effect transistor is provided. The field effect transistor includes a first source/drain on a substrate, a second source/drain on the substrate, and a channel region between the first source/drain and the second source/drain. The field effect transistor further includes a metal liner on at least three sides of the first source/drain and/or the second source/drain, wherein the metal liner covers less than the full length of a sidewall of the first source/drain and/or the second source/drain. The field effect transistor further includes a metal-silicide between the metal liner and the first source/drain and/or the second source/drain, and a conductive contact on the metal liner on the first source/drain and/or the second source/drain, wherein the conductive contact is a conductive material different from the conductive material of the metal liner.


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