The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2022

Filed:

Jun. 21, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Benjamin Cherian, San Jose, CA (US);

Nicholas Wiswell, Sunnyvale, CA (US);

Jun Qian, Sunnyvale, CA (US);

Thomas H. Osterheld, Mountain View, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06N 3/08 (2006.01); G05B 13/02 (2006.01); G05B 19/4063 (2006.01); G05B 19/4155 (2006.01); G06N 3/04 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06N 3/08 (2013.01); G05B 13/027 (2013.01); G05B 19/4063 (2013.01); G05B 19/4155 (2013.01); G06N 3/0454 (2013.01); H01L 22/12 (2013.01); G05B 2219/32335 (2013.01); G05B 2219/40066 (2013.01); G05B 2219/41054 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/45199 (2013.01);
Abstract

A method of generating training spectra for training of a neural network includes generating a plurality of theoretically generated initial spectra from an optical model, sending the plurality of theoretically generated initial spectra to a feedforward neural network to generate a plurality of modified theoretically generated spectra, sending an output of the feedforward neural network and empirically collected spectra to a discriminatory convolutional neural network, determining that the discriminatory convolutional neural network does not discriminate between the modified theoretically generated spectra and empirically collected spectra, and thereafter, generating a plurality of training spectra from the feedforward neural network.


Find Patent Forward Citations

Loading…