The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2022

Filed:

Dec. 03, 2020
Applicants:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

National Taiwan University, Taipei, TW;

Inventors:

Jenn-Gwo Hwu, Taipei, TW;

Chien-Shun Liao, Hsinchu, TW;

Wei-Chih Kao, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/739 (2006.01); H01L 29/51 (2006.01); H01L 29/49 (2006.01); H01L 29/45 (2006.01); H01L 29/06 (2006.01); G11C 16/10 (2006.01); H01L 29/66 (2006.01); G11C 16/04 (2006.01); H01L 29/423 (2006.01); G11C 16/26 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7391 (2013.01); G11C 16/0466 (2013.01); G11C 16/10 (2013.01); G11C 16/26 (2013.01); H01L 29/0649 (2013.01); H01L 29/0684 (2013.01); H01L 29/40117 (2019.08); H01L 29/4234 (2013.01); H01L 29/45 (2013.01); H01L 29/4966 (2013.01); H01L 29/513 (2013.01); H01L 29/518 (2013.01); H01L 29/66356 (2013.01);
Abstract

Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.


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