The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Apr. 09, 2021
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
Method for fabricating a semiconductor structure is provided. First features are formed in a first product region of each die area and in a material layer through a first mask. Second features are formed in a second product region of each die area and in the material layer through a second mask. Third features are formed in a third product region of each die area and in the material layer through a third mask. Fourth features are formed in a fourth product region of each die area and in the material layer through a fourth mask. Fifth features are formed in an alignment region between the first, second, third and fourth product regions of each die area and in the material layer through the first, second, third and fourth masks. The first product region is free of the second, third, and fourth features.