The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2022
Filed:
Jul. 22, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Jian Li, Fremont, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Zheng John Ye, Santa Clara, CA (US);
Daemian Raj Benjamin Raj, Fremont, CA (US);
Shailendra Srivastava, Fremont, CA (US);
Xinhai Han, Santa Clara, CA (US);
Deenesh Padhi, Sunnyvale, CA (US);
Kesong Hu, Pleasanton, CA (US);
Chuan Ying Wang, Sunnyvale, CA (US);
Applied Materials, Inc., Mountain View, CA (US);
Abstract
Exemplary support assemblies may include an electrostatic chuck body defining a substrate support surface. The assemblies may include a support stem coupled with the electrostatic chuck body. The assemblies may include a heater embedded within the electrostatic chuck body. The assemblies may also include an electrode embedded within the electrostatic chuck body between the heater and the substrate support surface. The substrate support assemblies may be characterized by a leakage current through the electrostatic chuck body of less than or about 4 mA at a temperature of greater than or about 500° C. and a voltage of greater than or about 600 V.