The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2022

Filed:

Aug. 07, 2018
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Huang-Chun Wen, Dallas, TX (US);

Richard Allen Bailey, Richardson, TX (US);

Antonio Guillermo Acosta, Richardson, TX (US);

John A. Rodriguez, Dallas, TX (US);

Scott Robert Summerfelt, Garland, TX (US);

Kemal Tamer San, Plano, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11507 (2017.01); H01L 21/02 (2006.01); H01L 23/31 (2006.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11507 (2013.01); H01L 21/0217 (2013.01); H01L 21/02118 (2013.01); H01L 21/02197 (2013.01); H01L 21/02318 (2013.01); H01L 21/56 (2013.01); H01L 23/3192 (2013.01); H01L 23/562 (2013.01); H01L 24/02 (2013.01); H01L 23/3114 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 2224/024 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05569 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13024 (2013.01); H01L 2924/07025 (2013.01);
Abstract

Curing of a passivation layer applied to the surface of a ferroelectric integrated circuit so as to enhance the polarization characteristics of the ferroelectric structures. A passivation layer, such as a polyimide, is applied to the surface of the ferroelectric integrated circuit after fabrication of the active devices. The passivation layer is cured by exposure to a high temperature, below the Curie temperature of the ferroelectric material, for a short duration such as on the order of ten minutes. Variable frequency microwave energy may be used to effect such curing. The cured passivation layer attains a tensile stress state, and as a result imparts a compressive stress upon the underlying ferroelectric material. Polarization may be further enhanced by polarizing the ferroelectric material prior to the cure process.


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