logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11495602 B1

PDFFull Text
Date of Patent:
Nov. 08, 2022

Filed:

Jan. 12, 2022

Method and device for determining fabrication chamber

Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventors:

Zhenxing Li, Hefei, CN;

Yuming Wang, Hefei, CN;

Fang Wang, Hefei, CN;

San-Chen Chen, Hefei, CN;

Chen-Hua Shen, Hefei, CN;

Assignee:

CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;

Attorney:

Cooper Legal Group, LLC

Primary Examiner:

Roberts P Culbert

Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/67 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1085 (2013.01); H01L 21/306 (2013.01); H01L 21/67069 (2013.01);
Abstract

Embodiments of the present disclosure provide a method and a device for determining a fabrication chamber. According to a current radio frequency power time of each of the fabrication chambers corresponding to adjacent process steps and service phases divided based on a service period of the fabrication chambers, a service phase is determined for the current radio frequency power time of each of the fabrication chambers. For target objects processed by the fabrication chambers in the current process step, fabrication chambers for the target objects to enter in a next process step are directly determined according to the service phase of the current radio frequency power time of each of the fabrication chambers.

Find Patent Forward Citations

Li, Zhenxing. (2022). Method and device for determining fabrication chamber (U.S. Patent No. 11495602). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11495602

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…