The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2022
Filed:
Dec. 29, 2014
Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do, KR;
Jae Hwan Sim, Gyeonggi-do, KR;
So-Yeon Kim, Gyeonggi-do, KR;
Jung Kyu Jo, Gyeonggi, KR;
Hye-Won Lee, Gyeonggi-do, KR;
Jihoon Kang, Gyeonggi-do, KR;
Jae-Bong Lim, Chungcheongnam-do, KR;
Jun-Han Yun, Gyeonggi-do, KR;
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD., Chungcheongnam-Do, KR;
Abstract
An anti-reflective coating composition is provided. The anti-reflective coating composition of the present invention can be useful in preventing a pull-back phenomenon in which an anti-reflective coating layer tears on a corner of a pattern of a substrate during a heat curing process and improving gap-filling performance of the pattern since a crosslinker is attached to a polymer in the composition and the content of the low-molecular-weight crosslinker in the composition is minimized to regulate a heat curing initiation temperature.