The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2022
Filed:
Oct. 25, 2018
Applicant:
Hansol Chemical Co., Ltd., Seoul, KR;
Inventors:
Jung-Wun Hwang, Jeollabuk-do, KR;
Ki-Yeung Mun, Jeollabuk-do, KR;
Jun-Won Lee, Jeollabuk-do, KR;
Kyu-Hyun Yeom, Jeollabuk-do, KR;
Jang-Hyeon Seok, Sejong-si, KR;
Jung-Woo Park, Seoul, KR;
Assignee:
HANSOL CHEMICAL. CO., LTD., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C07F 5/06 (2006.01); C07F 3/06 (2006.01);
U.S. Cl.
CPC ...
C07F 5/062 (2013.01); C07F 3/06 (2013.01); C23C 16/18 (2013.01); C23C 16/45527 (2013.01);
Abstract
The present invention relates to precursor compounds, and more particularly to nonpyrophoric precursor compounds suitable for use in thin film deposition through atomic layer deposition (ALD) or chemical vapor deposition (CVD), and to an ALD/CVD process using the same.