The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2022
Filed:
Jul. 29, 2019
Korea Research Institute of Standard and Science, Daejeon, KR;
Young-sik Ghim, Sejong, KR;
Hyug-gyo Rhee, Daejeon, KR;
Korea Research Institute of Standard and Science, Daejeon, KR;
Abstract
The present invention relates to an apparatus and a method for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization. More specifically, the present invention relates to an apparatus for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization in an apparatus for measuring a thickness and a refractive index of a measurement object coated with the multilayer thin film, the apparatus including: an illumination optical module having a light source emitting light; a first beam splitter configured to reflect some of the light emitted from the illumination optical module; an objective lens configured to input some of the light reflected from the first beam splitter to the measurement object constituted by the multilayer thin film and reflect the remaining light to a reference plane to form interference light on a back focal plane; a second beam splitter in which interference light where the reflected light incident and reflected to the measurement object interferes with the reflected light reflected from the reference plane is incident, wherein some of the interference light is reflected and the remaining interference light is transmitted; a first angle-resolved spectral image acquiring unit configured to receive interference light reflected from the second beam splitter and first-polarize the interference light located in the back focal plane of the objective lens to acquire a first polarized interference image; and a second angle-resolved spectral image acquiring unit configured to receive interference light transmitted from the second beam splitter and second-polarize the interference light located in the back focal plane of the objective lens to acquire a second polarized interference image.