The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2022
Filed:
Nov. 13, 2019
Applicant:
Dnf Co., Ltd., Daejeon, KR;
Inventors:
Myong Woon Kim, Daejeon, KR;
Sang Ick Lee, Daejeon, KR;
Jang Woo Seo, Daejeon, KR;
Sang Yong Jeon, Sejong-si, KR;
Haeng Don Lim, Daejeon, KR;
Assignee:
DNF CO., LTD., Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); C07F 17/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C07F 17/00 (2013.01); C23C 16/45553 (2013.01); C23C 16/56 (2013.01);
Abstract
The present invention provides a method for manufacturing a molybdenum-containing thin film and a molybdenum-containing thin film manufactured thereby. By using a molybdenum (0)-based hydrocarbon compound and a predetermined reaction gas, the method for manufacturing a molybdenum-containing thin film according to the present invention enables easy manufacturing of a highly pure thin film in a simple process.