The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2022

Filed:

Sep. 18, 2020
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Jiun-Yi Wu, Taoyuan, TW;

Chien-Hsun Lee, Hsinchu County, TW;

Chewn-Pu Jou, Hsinchu, TW;

Fu-Lung Hsueh, Kaohsiung, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/552 (2006.01); H05K 3/42 (2006.01); H05K 1/02 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01); H05K 1/11 (2006.01); H05K 3/00 (2006.01); H05K 3/40 (2006.01);
U.S. Cl.
CPC ...
H05K 1/0216 (2013.01); H01L 21/485 (2013.01); H01L 21/486 (2013.01); H01L 21/76805 (2013.01); H01L 23/49827 (2013.01); H01L 23/552 (2013.01); H05K 1/024 (2013.01); H05K 1/0222 (2013.01); H05K 1/113 (2013.01); H05K 1/115 (2013.01); H05K 3/0047 (2013.01); H05K 3/4007 (2013.01); H05K 3/423 (2013.01); H05K 1/0245 (2013.01); H05K 3/4038 (2013.01); H05K 3/42 (2013.01); H05K 2201/0723 (2013.01); H05K 2201/0959 (2013.01); H05K 2201/09545 (2013.01); H05K 2201/09645 (2013.01); Y10T 29/49165 (2015.01);
Abstract

An interconnect structure includes a substrate, a dielectric block, and a conductor. The dielectric block is in the substrate. A dielectric constant of the dielectric block is smaller than a dielectric constant of the substrate, and the dielectric block and the substrate have substantially the same thickness. The conductor includes a first portion extending from a top surface to a bottom surface of the dielectric block and a second portion extending along and contacting the top surface of the dielectric block.


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