The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2022
Filed:
Apr. 16, 2018
Tokyo Electron Limited, Tokyo, JP;
Kentaro Konishi, Nirasaki, JP;
Jun Fujihara, Nirasaki, JP;
Hiroki Shikagawa, Nirasaki, JP;
Hiroshi Yamada, Nirasaki, JP;
Yukinori Murata, Nirasaki, JP;
Katsuaki Sugiyama, Nirasaki, JP;
Shin Uchida, Nirasaki, JP;
Tetsuya Kagami, Nirasaki, JP;
Hiroaki Hayashi, Nirasaki, JP;
Rika Ozawa, Nirasaki, JP;
Takanori Hyakudomi, Nirasaki, JP;
Xingjun Jiang, Nirasaki, JP;
Kenichi Narikawa, Nirasaki, JP;
Tomoya Endo, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.