The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2022
Filed:
Sep. 14, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Liqi Wu, San Jose, CA (US);
Hung Nguyen, San Jose, CA (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Mark Saly, Santa Clara, CA (US);
Feng Q. Liu, San Jose, CA (US);
David Thompson, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); C23C 16/04 (2006.01); C23C 16/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0228 (2013.01); C23C 16/04 (2013.01); H01L 21/02178 (2013.01); H01L 21/02205 (2013.01); H01L 21/02244 (2013.01); C23C 16/20 (2013.01);
Abstract
Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on a metal layer relative to a dielectric layer by exposing a substrate to an organometallic precursor followed by exposure to an oxidant.