The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Mar. 19, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
David H. Quach, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); C23C 16/509 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4557 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); C23C 16/509 (2013.01); H01J 37/32009 (2013.01); H01J 37/3244 (2013.01); H01J 37/32532 (2013.01); H01J 2237/3321 (2013.01);
Abstract
An apparatus for distributing a gas within a process chamber is disclosed. The apparatus has a body formed from a distribution portion surrounded by a coupling portion. A heater is disposed within the distribution portion to heat the body to an elevated temperature. A bridge extends between the coupling portion and the distribution portion. The bridge limits heat transfer between the distribution portion and the coupling portion.