The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2022

Filed:

Mar. 01, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Haruka Sakuma, Mie, JP;

Kiwamu Sakuma, Mie, JP;

Masumi Saitoh, Mie, JP;

Assignee:

KIOXIA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C 11/22 (2006.01); H01L 29/51 (2006.01); H01L 27/11592 (2017.01); H01L 27/11587 (2017.01); H01L 27/1159 (2017.01);
U.S. Cl.
CPC ...
G11C 11/223 (2013.01); G11C 11/2255 (2013.01); G11C 11/2257 (2013.01); G11C 11/2273 (2013.01); G11C 11/2275 (2013.01); G11C 11/2277 (2013.01); H01L 27/1159 (2013.01); H01L 27/11587 (2013.01); H01L 27/11592 (2013.01); H01L 29/516 (2013.01);
Abstract

A semiconductor storage device includes a plurality of gate electrodes, a semiconductor layer facing the plurality of gate electrodes, a gate insulating layer arranged between each of the plurality of gate electrodes and the semiconductor layer. The gate insulating layer contains oxygen (O) and hafnium (Hf) and has an orthorhombic crystal structure. A plurality of first wirings is connected to the respective gate electrodes. A controller is configured to execute a write sequence and an erasing sequence by applying certain voltages to at least one of the first wirings. The controller is further configured to increase either a program voltage to be applied to the first wirings in the write sequence or an application time of the program voltage in the write sequence after a total number of executions of the write sequence or the erasing sequence has reached a particular number.


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