The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Mar. 11, 2019
Tokyo Electron Limited, Tokyo, JP;
Koji Yoshii, Iwate, JP;
Tatsuya Yamaguchi, Iwate, JP;
Hiroyuki Hayashi, Yamanashi, JP;
Mitsuhiro Okada, Yamanashi, JP;
Satoshi Takagi, Yamanashi, JP;
Toshihiko Takahashi, Yamanashi, JP;
Masafumi Shoji, Iwate, JP;
Kazuya Kitamura, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.