The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Jun. 04, 2021
Synopsys, Inc., Mountain View, CA (US);
Zachary Adam Levinson, Austin, TX (US);
Yudhishthir Prasad Kandel, Durham, NC (US);
Ulrich Welling, Munich, DE;
Synopsys, Inc., Mountain View, CA (US);
Abstract
Calibrating stochastic signals in compact modeling is provided by obtaining data of process variations in producing a resist mask; calibrating a continuous compact model of the resist mask based on the data; evaluating the continuous compact model against a stochastic compact model that is based on the data; choosing a functional description of an edge location distribution for the stochastic compact model; mapping image parameters from the evaluation to edge distribution parameters according to the functional description; determining an edge location range for the stochastic compact model based on scaled measurements from the image parameters; calibrating a threshold for the resist mask and updating parameters of the stochastic compact model to reduce a difference between the data and a modeled Line Edge Roughness (LER) value; and outputting the stochastic compact model.