The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Oct. 16, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/10 (2012.01); B24B 37/013 (2012.01); G01J 3/10 (2006.01); G01J 3/42 (2006.01); B24B 49/12 (2006.01); G01N 21/95 (2006.01); B24B 37/20 (2012.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
B24B 37/013 (2013.01); B24B 37/10 (2013.01); B24B 37/107 (2013.01); B24B 37/205 (2013.01); B24B 49/12 (2013.01); G01J 3/0218 (2013.01); G01J 3/0291 (2013.01); G01J 3/10 (2013.01); G01J 3/42 (2013.01); G01N 21/9501 (2013.01);
Abstract
There is disclosed a polishing apparatus which allows for easy replacement of a light source with another type of light source. The light-source assembly includes: a base fixed to a polishing table and coupled to a light-emitting transmission line; and a light-source module having a lamp for emitting light. The light-source module is removably attached to the base. The base is a common base which is adapted to any of a plurality of light-source modules of different types including the light-source module. The base includes a positioning structure which achieves positioning of the light-source module relative to the base.