The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
Sep. 23, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventor:
Premchandra M. Shankar, Fremont, CA (US);
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/95 (2006.01); G06T 5/50 (2006.01); G06K 9/62 (2022.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01N 21/9501 (2013.01); G06K 9/6284 (2013.01); G06T 5/50 (2013.01); G06T 2207/30148 (2013.01);
Abstract
For semiconductor inspection images, detection thresholds can be determined based on probability density functions at a pixel intensity. The detection thresholds can then be applied to an image. This can find outliers at a fixed probability at all pixel intensity levels by estimating the probability distribution of underlying data and adapting the detection threshold values. Laser power can be optimized based on the detection thresholds.