The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

Nov. 27, 2015
Applicant:

Siltectra Gmbh, Dresden, DE;

Inventors:

Jan Richter, Dresden, DE;

Christian Beyer, Freiberg, DE;

Ralf Rieske, Dresden, DE;

Assignee:

Siltectra GmbH, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B23K 26/40 (2014.01); B28D 5/00 (2006.01); H01L 21/78 (2006.01); B23K 26/53 (2014.01); H01L 21/02 (2006.01); B23K 26/402 (2014.01); H01L 21/304 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/53 (2015.10); B23K 26/40 (2013.01); B23K 26/402 (2013.01); B28D 5/0011 (2013.01); H01L 21/02019 (2013.01); H01L 21/3043 (2013.01); H01L 21/78 (2013.01); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); H05K 999/99 (2013.01);
Abstract

A method for creating a detachment zone in a solid includes: providing a solid which is to be processed; providing a laser light source; subjecting the solid to laser radiation from the laser light source so that laser beams penetrate into the solid via a surface of the solid portion that is to be cut off; applying the laser radiation in a defined manner to a predefined portion of the solid inside the solid such that a detachment zone or a plurality of partial detachment zones is formed; wherein a number of modifications are successively created in the crystal lattice by the applied laser radiation, and the crystal lattice fissures at least partially in the regions surrounding the modifications as a result of the modifications, the fissures in the region of the modifications predefining the detachment zone or the plurality of partial detachment zones.


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