The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2022

Filed:

Oct. 28, 2020
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Tony M. Lindenberg, Boise, ID (US);

Kurt J. Bossart, Eagle, ID (US);

Jonathan S. Hacker, Meridian, ID (US);

Chandra S. Tiwari, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/67 (2006.01); G01R 1/073 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2831 (2013.01); G01R 1/07342 (2013.01); G01R 31/2863 (2013.01); G01R 31/2865 (2013.01); G01R 31/2889 (2013.01); H01L 21/67259 (2013.01); H01L 21/67271 (2013.01); H01L 21/681 (2013.01);
Abstract

A testing probe apparatus for testing die. The testing probe may include a probe interface and a carrier for supporting at least one die comprising 3D interconnect (3DI) structures. The probe interface may be positionable on a first side of the at least one die and include a voltage source and at least one first inductor operably coupled to the voltage source. A voltage sensor and at least one second inductor coupled to the voltage sensor may be disposed on a second opposing side of the at least one die. The voltage source of the probe interface may be configured to inductively cause a voltage within the 3DI structures of the at least one die via the at least one first inductor. The voltage sensor may be configured to sense a voltage within the at least one 3DI structure via the at least one second inductor. Related systems and methods are also disclosed.


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