The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2022

Filed:

Dec. 17, 2018
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Hitoshi Yamano, Kawasaki, JP;

Takahiro Kojima, Kawasaki, JP;

Yoichi Hori, Kawasaki, JP;

Yasuhiro Yoshii, Kawasaki, JP;

Masahito Yahagi, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01); C08F 12/24 (2006.01); C08F 220/30 (2006.01); C09D 125/18 (2006.01); C08F 212/14 (2006.01); C08F 220/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C08F 12/24 (2013.01); C08F 212/24 (2020.02); C08F 220/1807 (2020.02); C08F 220/1808 (2020.02); C08F 220/30 (2013.01); C09D 125/18 (2013.01); G03F 7/30 (2013.01); G03F 7/38 (2013.01);
Abstract

A resist composition including a resin component whose solubility in a developing solution is changed due to the action of the acid, in which the resin component has a constitutional unit derived from a compound represented by Formula (a0-1) and a constitutional unit containing an acid decomposable group whose polarity is increased due to the action of the acid. In the formula, W represents a polymerizable group-containing group, Yarepresents a carbon atom, Xarepresents a group that forms a monocyclic aliphatic hydrocarbon group together with Ya, some or all hydrogen atoms in the monocyclic aliphatic hydrocarbon group may be substituted with substituents, and Rarepresents an aromatic hydrocarbon group which may have a substituent.


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