The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2022
Filed:
Mar. 16, 2021
Hitachi High-tech Science Corporation, Tokyo, JP;
Masatsugu Shigeno, Tokyo, JP;
Hiroyoshi Yamamoto, Tokyo, JP;
Yoshiteru Shikakura, Tokyo, JP;
Kunihito Higa, Tokyo, JP;
HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo, JP;
Abstract
Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.