The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2022

Filed:

Oct. 02, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Junjing Bao, San Diego, CA (US);

Jun Yuan, San Diego, CA (US);

Peijie Feng, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 21/768 (2006.01); H01L 21/3213 (2006.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41775 (2013.01); H01L 21/76883 (2013.01); H01L 29/401 (2013.01); H01L 29/41766 (2013.01); H01L 29/4236 (2013.01); H01L 21/32139 (2013.01); H01L 29/45 (2013.01);
Abstract

Disclosed are optimized contract structures and fabrication techniques thereof. At least one aspect includes a semiconductor die. The semiconductor die includes a substrate and a contact disposed within the substrate. The contact includes a first portion with a first vertical cross-section having a first cross-sectional area. The first vertical cross-section has a first width and a first height. The contact also includes a second portion with a second vertical cross-section having a second cross-sectional area less than the first cross-sectional area. The second vertical cross-section includes a lower portion having the first width and a second height less than the first height, and an upper portion disposed above the lower portion and having a second width less than the first width and having a third height less than the first height.


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