The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
May. 21, 2020
Asml Netherlands B.v., Veldhoven, NL;
Gijs Kramer, Nijmegen, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Nicholas Peter Waterson, Duizel, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Yuri Johannes Gabriël Van De Vijver, Best, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Simon Karel Ravensbergen, Veldhoven, NL;
Vincentius Fransiscus Cloosterman, Eindhoven, NL;
Siegfried Alexander Tromp, Knegsel, NL;
Coen Hubertus Matheus Baltis, Eindhoven, NL;
Justin Johannes Hermanus Gerritzen, Veldhoven, NL;
Niek Jacobus Johannes Roset, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is configured to fluidly communicate an extraction channel in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.