The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Mar. 15, 2019
Applicant:
Aveni, Massy, FR;
Inventors:
Vincent Mevellec, Boulogne Billancourt, FR;
Dominique Suhr, Chatenay Malabry, FR;
Mikailou Thiam, Compiegne, FR;
Louis Caillard, Paris, FR;
Assignee:
aveni, Massy, FR;
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/12 (2006.01); C25D 5/50 (2006.01); C25D 7/12 (2006.01); H01L 21/02 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C25D 3/12 (2013.01); C25D 5/50 (2013.01); C25D 7/123 (2013.01); H01L 21/02164 (2013.01); H01L 21/2885 (2013.01); H01L 21/76877 (2013.01);
Abstract
The present invention relates to a process for the fabrication of cobalt interconnections and to an electrolyte which enables the implementation thereof. The electrolyte which has a pH below 4.0 comprises cobalt ions, chloride ions and at most two organic additives of low molecular weight. One of these additives may be an alpha-hydroxy carboxylic acid or a compound having a pKa value ranging from 1.8 to 3.5.