The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Jan. 28, 2021
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventor:

Yuichiro Yokoyama, Chiba, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2022.01); G01B 11/02 (2006.01); G02B 27/28 (2006.01); G01B 9/02017 (2022.01);
U.S. Cl.
CPC ...
G01B 11/026 (2013.01); G01B 9/02019 (2013.01); G01B 9/02021 (2013.01); G01B 9/02034 (2013.01); G01B 9/02049 (2013.01); G02B 27/285 (2013.01);
Abstract

A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.


Find Patent Forward Citations

Yokoyama, Yuichiro. (2022). Laser interference device (U.S. Patent No. 11378386). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11378386

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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