The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Jan. 23, 2018
Applicant:

Fujimi Incorporated, Kiyosu, JP;

Inventors:

Yukinobu Yoshizaki, Kiyosu, JP;

Koichi Sakabe, Kiyosu, JP;

Satoru Yarita, Kiyosu, JP;

Kenichi Komoto, Kiyosu, JP;

Assignee:

FUJIMI INCORPORATED, Kiyosu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/34 (2006.01); C11D 11/00 (2006.01); C11D 7/10 (2006.01); C11D 7/20 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); C11D 7/36 (2006.01); H01L 21/02 (2006.01); B08B 1/00 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); C11D 7/10 (2013.01); C11D 7/105 (2013.01); C11D 7/20 (2013.01); C11D 7/265 (2013.01); C11D 7/266 (2013.01); C11D 7/3218 (2013.01); C11D 7/34 (2013.01); C11D 7/36 (2013.01); H01L 21/02057 (2013.01); B08B 1/002 (2013.01); B08B 3/02 (2013.01); B08B 3/08 (2013.01);
Abstract

The present invention provides a means by which it is possible to sufficiently suppress an organic residue while favorably decreasing a ceria residue on a polished object to be polished obtained after being polished using a polishing composition containing ceria. The present invention relates to a composition for surface treatment, which is for a surface treatment of a polished object to be polished obtained after being polished using a polishing composition containing ceria, contains a carboxy group-containing (co)polymer having a structural unit derived from a monomer having a carboxy group or a salt group of the carboxy group, a SOor NOpartial structure-containing compound having a partial structure represented by SOor NO(where x and y each independently denote a real number 1 to 5), and a dispersing medium, and has a pH of 1 or more and 8 or less.


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